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Silicides for VLSI Applications
1st Edition - March 28, 1983
Author: Shyam P. Murarka
Language: English
eBook ISBN:9780080570563
9 7 8 - 0 - 0 8 - 0 5 7 0 5 6 - 3
Most of the subject matter of this book has previously been available only in the form of research papers and review articles. I have not attempted to refer to all the published…Read more
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Most of the subject matter of this book has previously been available only in the form of research papers and review articles. I have not attempted to refer to all the published papers. The reader may find it advantageous to refer to the references listed.
It is written for practicing device engineers, materials scientists, and newcomers, including students of microelectronics technology.