Sensors and Actuators A: Physical

Editor in Chief P.J. French Technische Universiteit Delft, Delft, Netherlands, Editor for N & S America L. Lin University of California at Berkeley, Berkeley, CA, USA, Editor for Japan T. Morita University of Tokyo, Tokyo, Japan, Editors for Micromechanics Section V.M. Bright University of Colorado, Boulder, CO, USA, Q. Lin Columbia University, New York, NY, USA, M. Shikida Nagoya University, Nagoya, Japan, H.A.C. Tilmans IMEC, Leuven, Belgium, J.E. Wood University of New Mexico, Albuquerque, NM, USA, Founding Editor S. Middelhoek Delft, Netherlands, Editorial Board M. Ai Kashiwa-City, Japan, M. Bao Shanghai, China, W. Benecke Bremen, Germany, S. Bouwstra Amsterdam, Netherlands, A. D'Amico Roma, Italy, N.F. de Rooij Neuchâtel, Switzerland, M. Esashi Sendai, Japan, H. Fujita Meguro-Ku, Japan, Y.B. Gianchandani Ann Arbor, MI, USA, K.T.V. Grattan London, UK, R.T. Howe Berkeley, CA, USA, K. Ikuta Nagoya, Japan, W.H. Ko Cleveland, OH, USA, T. Kobayashi Yokohama-Shi, Japan, S. Konishi Kusatsu-Shi, Japan, G.T.A. Kovacs Stanford, USA, J.H. Lang Cambridge, MA, USA, W. Lang Bremen, Germany, M.A. Marcus Rochester, NY, USA, C.H. Mastrangelo Ann Arbor, MI, USA, A. Nathan Waterloo, ON, Canada, M. Okuyama Osaka, Japan, O. Paul Freiburg, Germany, K.E. Petersen Fremont, CA, USA, R. Puers Haverlee, Belgium, CH.S. Roumenin Sofia, Bulgaria, S.D. Senturia Cambridge, MA, USA, O. Tabata Kusatsu-Shi, Japan, Y-C. Tai Pasadena, CA, USA, J. Van der Spiegel Philadelphia, PA, USA, K.D. Wise Ann Arbor, MI, USA, M.C. Wu Los Angeles, CA, USA, H. Yamasaki Tokyo, Japan, S. Yokota Yokohama, Japan