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Handbook of Sputter Deposition Technology
 
 

Handbook of Sputter Deposition Technology, 2nd Edition

Fundamentals and Applications for Functional Thin Films, Nano-Materials and MEMS

 
Handbook of Sputter Deposition Technology, 2nd Edition,Kiyotaka Wasa,ISBN9781437734836
 
 
 

  

William Andrew

9781437734836

9781437734843

648

229 X 152

Handbook of Sputtering Technology provides a practical and theoretical overview of sputter deposition technology, a coating technology widely used in the automotive, medical, semiconductors, space, plastics, and military industries

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Key Features

  1. A strong applications focus, covering current and emerging technologies, including nano-materials and MEMS (microelectrolmechanical systems) for energy, environments, communications, and/or bio-medical field. New chapters on computer simulation of sputtering and MEMS completes the update and insures that the new edition includes the most current and forward-looking coverage available.
  2. All applications discussed are supported by theoretical discussions, offering readers both the "how" and the "why" of each technique.

40% revision: the new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications that are covered in the book and providing the most up-to-date coverage available anywhere.

Description

This thoroughly updated new edition includes an entirely new team of contributing authors with backgrounds specializing in the various new applications of sputtering technology. It forms a bridge between fundamental theory and practical application, giving an insight into innovative new materials, devices and systems.

Organized into three parts for ease of use, this Handbook introduces the fundamentals of thin films and sputtering deposition, explores the theory and practices of this field, and also covers new technology such as nano-functional materials and MEMS.

Wide varieties of functional thin film materials and processing are described, and experimental data is provided with detailed examples and theoretical descriptions.

Readership

Materials and Electrical Engineers in the automotive, medical, semiconductors, space, plastics, and military industries.

Kiyotaka Wasa

Affiliations and Expertise

Matsushita Electric, Ltd. and Yokohama City University, Japan

Handbook of Sputter Deposition Technology, 2nd Edition

  1. Thin Film and Nano-materials
  2. Thin Film and Nanomaterial Processes
  3. Sputtering Phenomena
  4. Computer Simulation of Sputtering
  5. Sputtering Systems
  6. Deposition of Compound Thin Films
  7. Nanometer Materials and Devices
  8. Microfabrications

Appendix

List of Acronyms

Index

 
 
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