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Microfabrication for Industrial Applications

  • 1st Edition - April 1, 2000
  • Author: Regina Luttge
  • Language: English
  • Hardback ISBN:
    9 7 8 - 0 - 8 1 5 5 - 1 5 8 2 - 1
  • eBook ISBN:
    9 7 8 - 0 - 8 1 5 5 - 1 9 7 7 - 5

Microfabrication for Industrial Applications focuses on the industrial perspective for micro- and nanofabrication methods including large-scale manufacturing, transfer of concep… Read more

Microfabrication for Industrial Applications

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Microfabrication for Industrial Applications focuses on the industrial perspective for micro- and nanofabrication methods including large-scale manufacturing, transfer of concepts from lab to factory, process tolerance, yield, robustness, and cost. It gives a history of miniaturization, micro- and nanofabrication, and surveys industrial fields of application, illustrating fabrication processes of relevant micro and nano devices.Concerning sub-micron feature manufacture, the book explains: the philosophy of micro/ nanofabrication for integrated circuit industry; thin film deposition; (waveguide, plastic, semiconductor) material processing; packaging; interconnects; stress (e.g., thin film residual); economic; and environmental aspects.Micro/nanomechanical sensors and actuators are explained in depth with information on applications, materials (incl. functional polymers), methods, testing, fabrication, integration, reliability, magnetic microstructures, etc.