Key Features
• Shows engineers & students how to evaluate the potential value of current and nearfuture manufacturing processes for miniaturized systems in industrial environments
• Explains the top-down and bottom up approaches to nanotechnology, nanostructures fabricated with beams, nano imprinting methods, nanoparticle manufacturing (and their health aspects), nanofeature analysis, and connecting nano to micro to macro
• Discusses issues for practical application cases; possibilities of dimension precision; large volume manufacturing of micro- & nanostructures (machines, materials, costs)
• Explains applications of Microsystems for information technology, e.g.: data recording (camera, microphone), storage (memories, CDs), communication; computing; and displays (beamers, LCD, TFT)
• Case studies are given for sensors, resonators, probes, transdermal medical systems, micro- pumps & valves, inkjets, DNA-analysis, lab-on-a-chip, & micro-cooling
Description
This book focuses on the industrial perspective for micro- and nanofabrication methods including large-scale manufacturing, transfer of concepts from lab to factory, process tolerance, yield, robustness, and cost. It gives a history of miniaturization, micro- and nanofabrication, and surveys industrial fields of application, illustrating fabrication processes of relevant micro and nano devices.
Concerning sub-micron feature manufacture, the book explains: the philosophy of micro/ nanofabrication for integrated circuit industry; thin film deposition; (waveguide, plastic, semiconductor) material processing; packaging; interconnects; stress (e.g., thin film residual); economic; and environmental aspects.
Micro/nanomechanical sensors and actuators are explained in depth with information on applications, materials (incl. functional polymers), methods, testing, fabrication, integration, reliability, magnetic microstructures, etc.
Readership
Engineers in industry and at schools / universities; polytechnical students.
Microfabrication for Industrial Applications, 1st Edition
1. Introduction
reasons for miniaturisation
micro and nanofabrication through the ages (microcomponents and assembly versus monolithic approach)
overview of industrial fields of application
2. Microsystems technology
philosophy of micro/nanofabrication for integrated circuit industry
top-down approach to sub-micron feature manufacture
thin film deposition
processing of semiconductor materials (doping, oxidation, RTA, metallisation, SOI, etc.)
processing of waveguide materials
processing of plastic materials
packaging and interconnects
the stress issue: thin film residual stress, stress issues in packaging and interconnection
economical aspects of semiconductor manufacture
environmental aspects of semiconductor manufacture
3. Nanotechnology
top-down or bottom up
nanostructures fabricated with beams
nano imprinting methods
manufacturing nanoparticles
health aspects of nanoparticles
how to analyse nanofeatures?
connecting nano to micro to macro
quo vadis?
4. Microsystems for Information Technology
data recording (camera, microphone)
data storage (memories, CD's)
data (tele) communication
computing
displays (beamers, LCD, TFT)
5. Micro and nanomechanical sensors and actuators
application fields
materials and methods, general overview
silicon as a mechanical material
silicon micromachining: process tolerances and large-scale manufacturability
testing and assembly
integration and interconnection
temperature monitoring and control
reliability issues
case studies: pressure and acceleration sensors, resonators / rf-MEMS, scanning probes (AFM etc.)
smart materials: what is a "smart material," overview of materials for actuation and detection
fabrication and properties of piezoelectric microstructures
fabrication and properties of magnetic microstructure
other smart materials and their manufacturability, e.g. functional polymers
micro- and nanotransducer systems
6. Sensors for chemical and medical applications
application fields
materials and methods
surface modification methods
spotting techniques
nanostructures and nanoparticles
testing, assembly and interfacing; reliability issues
7. Microfluidic systems
mini-, micro- and nanofluidics: what are they and why are they of interest?
application fields
physics of fluids in micro- and nanochannels
silicon, glass or plastics?
temperature monitoring and control
integration and interconnection
testing and assembly; reliability issues
case studies: transdermal medical systems, micropumps, microvalves, inkjets, DNA-analysis, lab-on-a-chip, micro-cooling
8. Micro and nanotechnology for sustainable energy
solar cells based on semiconductors
future developments in solar energy: nanoparticles
microbatteries and micro fuel cells
microreactors for sustainable energy
reliability issues
alternative energy sources based on micro- and nanotechnology
