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Fabrication & Design of Resonant Microdevices
 
 

Fabrication & Design of Resonant Microdevices, 1st Edition

 
Fabrication & Design of Resonant Microdevices, 1st Edition,Behraad Bahreyni,ISBN9780815515777
 
 
 

  

William Andrew

9780815515777

250

254 X 178

This book explains the main issues of fabrication, design, and applications of micromachined resonant devices, and commonly used techniques for processing the output signal of resonant micro-electro-mechanical systems (MEMS)

Print Book

Hardcover

In Stock

Estimated Delivery Time
USD 195.00
 
 

Key Features

* Offers numerous academic and industrial examples of resonant MEMS
* Provides an analytic model of device behavior
* Explains two-port systems in detail
* Devotes ample space to excitation and signal detection methods
* Covers issues of damping and noise for resonant MEMS, two topics of particular importance for high-Q devices

Description

This book discusses the main issues of fabrication and design, and applications of micromachined resonant devices, including techniques commonly used for processing the output signal of resonant micro-electro-mechanical systems (MEMS). Concepts of resonance are introduced, with an overview of fabrication techniques for micromachined devices - important to understand as design options will depend on how the device will be fabricated. Also explained: excitation and signal detection methods; an analytic model of device behavior (a valuable design tool); numerical simulation techniques; issues of damping and noise for resonant MEMS; electronic interfacing; packaging issues; and numerous examples of resonant MEMS from academia and industry.

Readership

Engineers in the field of micromachining, the design of resonant devices, MEMS, or sensor design.

Behraad Bahreyni

Affiliations and Expertise

Cambridge University, UK

Fabrication & Design of Resonant Microdevices, 1st Edition

Introduction; Microfabrication; Actuation mechanisms; Sensing techniques; Modeling; Damping mechanisms; Interfacing; Noise; Packaging; Survey of applications
 
 

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