Description
The Handbook of Ellipsometry is a critical foundation text on an increasingly critical subject. Ellipsometry, a measurement technique based on phase and amplitude changes in polarized light, is becoming popular in a widening array of applications because of increasing miniaturization of integrated circuits and breakthroughs in knowledge of biological macromolecules deriving from DNA and protein surface research. Ellipsometry does not contact or damage samples, and is an ideal measurement technique for determining optical and physical properties of materials at the nano scale.
With the acceleration of new instruments and applications now occurring, this book provides an essential foundation for the current science and technology of ellipsometry for scientists and engineers in industry and academia at the forefront of nanotechnology developments in instrumentation, integrated circuits, biotechnology, and pharmaceuticals. Divided into four parts, this comprehensive handbook covers the theory of ellipsometry, instrumentation, applications, and emerging areas. Experts in the field contributed to its twelve chapters, covering various aspects of ellipsometry.
Readership
International scientific and instrumentation communities concerned with thin films, spectroscopic ellipsometry, optical measurement, proteomics (protein chip technology in genomics); theory and applications in thin films materials science including semiconductors.
Handbook of Ellipsometry, 1st Edition
PART 1: THEORY OF ELLIPSOMETRY
1. Polarized Light and Ellipsometry
Josef Humlfcek
1.1 A quick guide to ellipsometry
1.2 Maxwell and wave equations
1.3 Representations of polarization
1.4 Propagation of polarized light
1.5 Reflection and transmission of polarized light at planar interfaces
1.6 References
2. Optical Physics of Materials
Robert W. Collins
2.1 Introduction
2.2 Propagation of light in solids
2.3 Classical theories of the optical properties of solids
2.4 Quantum mechanical theories of the optical properties of solids
2.5 Modeling the optical properties of solids
2.6 Overview and concluding remarks
2.7 References and bibliography
3. Data Analysis for Spectroscopic Ellipsometry
Gerald E. Jellison, Jr.
3.1 Introduction
3.2 Ellipsometry parameters
3.3 Calculation of complex reflection coefficients
3.4 Models for dielectric functions
3.5 Fitting models to data
3.6 Determination of optical functions from spectroscopic ellipsometry data
3.7 Depolarization
3.8 Further reading and references
PART 2: INSTRUMENTATION
4. Optical Components and the Simple PCSA (polarizer, compensator, sample, analyzer) Ellipsometer
Harland G. Tompkins
4.1 General
4.2 The components
4.3 Ellipsometer component configurations
4.4 References
5. Rotating Polarizer and Analyzer Ellipsometry
Robert W. Collins, Ilsin An, Chi Chen
5.1 Introduction
5.2 Comparison of ellipsometers
5.3 Instrumentation issues
5.4 Data reduction for the rotating polarizer and analyzer ellipsometers
5.5 Precision considerations
5.6 Calibration procedures
5.7 Summary: recent and future directions
6. Polarization Modulation Ellipsometry
Gerald E. Jellison, Jr., Frank A. Modine
6.1 Introduction
6.2 The photoelastic modulator (PEM)
6.3 Experimental configurations of polarization modulation ellipsometers
6.4 Light intensity through a polarization modulation ellipsometer
6.5 Waveform analysis
6.6 Calibration procedures
6.7 Errors
6.8 Further reading and references
7. Multichannel Ellipsometry
Robert W. Collins, Ilsin An, Joungchel Lee, Juan A. Zapien
7.1 Introduction
7.2 Overview of instrumentation
7.3 Rotating element designs
7.4 Concluding remarks
7.5 References
PART 3: APPLICATIONS
8. SiO2 Films
Eugene A. Irene
8.1 Introduction
8.2 Historical perspectiveùprior to 1970
8.3 Modern studiesùsince 1970
8.4 Conclusions
8.5 References
9. Theory and Application of Generalized Ellipsometry
Mathias Schubert
9.1 Introduction
9.2 The generalized ellipsometry concept
9.3 Theory of generalized ellipsometry
9.4 Special generalized ellipsometry solutions
9.5 Strategies in generalized ellipsometry
9.6 Generalized ellipsometry applications
9.7 Conclusions
9.8 Further reading and references
PART 4: EMERGING AREAS
10. VUV Ellipsometry
James N. Hilfiker
10.1 Introduction
10.2 Historical review of short wavelength ellipsometry
10.3 VUV ellipsometry today
10.4 Importance of VUV ellipsometry
10.5 Survey of applications
10.6 Future of VUV ellipsometry
10.7 Acknowledgments
10.8 References
11. Spectroscopic Infrared Ellipsometry
Arnulf R÷seler
11.1 Introduction
11.2 Experimental tools
11.3 Applications
11.4 References
12. Ellipsometry in Life Sciences
Hans Arwin
12.1 Introduction
12.2 Historical background
12.3 The interfaces under study
12.4 From optics to biology
12.5 Methodology for data evaluation
12.6 Methodologyùexperimental
12.7 Applications
12.8 Outlook
12.9 References
Index
