Description
This book provides a comprehensive review of the primary industrial hygiene topics relevant to semiconductor processing: chemical and physical agents, and ventilation systems. The book also has excellent chapters on newer industrial hygiene concerns that are not specific to the semiconductor industry: ergonomics, indoor air quality, personal protective equipment, plan review, and records retention. While much of the information in these chapters can be applied to all industries, the focus and orientation is specific to issues in the semiconductor industry.
Readership
Industrial hygienists and safety engineers in the semiconductor industry
Semiconductor Industrial Hygiene Handbook, 1st Edition
1. Introduction
1.0 Foreword
2.0 Overview of Book
3.0 Background
References
2. Industrial Hygiene Monitoring
1.0 Overview of IH Monitoring
2.0 Assessment Tools
3.0 Biomonitoring: Urinary Arsenic Testing
4.0 Chemical Agents
References
3. Industrial Hygiene Monitoring: Physical Agents
1.0 Noise
2.0 Non-Ionizing Radiation
3.0 Ionizing Radiation
References
4. Ventilation
1.0 Background
2.0 Types
3.0 Monitoring
4.0 Guidelines/Standards
References
5. Personal Protective Equipment (PPE)
1.0 Background
2.0 Chemical Protective Gloves
3.0 Respiratory Protection
References
6. Indoor Air Quality (IAQ)
1.0 Recognition of IAQ Problems
2.0 Odor Identification
3.0 Causative Agents
4.0 Evaluation of IAQ Problems
5.0 Generally Recognized Acceptable Levels
6.0 Industrial Hygiene IAQ Monitoring Equipment
7.0 Prevention of IAQ Problems
8.0 Records
References
7. Ergonomics
1.0 Background
2.0 Identification and Evaluation of Physical Stressors
3.0 Stressful Postures Associated with CTD'S
4.0 Semiconductor Ergonomic/Material Handling Exposures
5.0 Ergonomic Design and Layout Principles
6.0 Semiconductor Equipment
7.0 Summary
References
8. Industrial Hygiene Recordkeeping
1.0 General
2.0 Continuous Monitor Records
3.0 Ventilation Records
4.0 Employee Communication
5.0 Personnel Records
References
9. Plan Review
1.0 Overview
References
Appendices
Appendix A: Silicon Ingot and Wafer Manufacturing
Appendix B: Silicon Device Manufacturing Introduction
Appendix C: III-V (GaAs)
Appendix D: III-V Device: Microwave IC
Appendix E: Ion Implanter Maintenance Safety Considerations
Appendix F: Bibliography
Glossary and Acronyms
Index
