Skip to main content

Save up to 30% on Elsevier print and eBooks with free shipping. No promo code needed.

Save up to 30% on print and eBooks.

Handbook of Silicon Based MEMS Materials and Technologies

  • 2nd Edition - September 2, 2015
  • Editors: Markku Tilli, Mervi Paulasto-Kröckel, Teruaki Motooka, Veikko Lindroos
  • Language: English
  • Hardback ISBN:
    9 7 8 - 0 - 3 2 3 - 2 9 9 6 5 - 7
  • eBook ISBN:
    9 7 8 - 0 - 3 2 3 - 3 1 2 2 3 - 3

The Handbook of Silicon Based MEMS Materials and Technologies, Second Edition, is a comprehensive guide to MEMS materials, technologies, and manufacturing that examines the state… Read more

Handbook of Silicon Based MEMS Materials and Technologies

Purchase options

LIMITED OFFER

Save 50% on book bundles

Immediately download your ebook while waiting for your print delivery. No promo code is needed.

Institutional subscription on ScienceDirect

Request a sales quote

The Handbook of Silicon Based MEMS Materials and Technologies, Second Edition,

is a comprehensive guide to MEMS materials, technologies, and manufacturing that examines the state-of-the-art with a particular emphasis on silicon as the most important starting material used in MEMS.

The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, manufacturing, processing, system integration, measurement, and materials characterization techniques, sensors, and multi-scale modeling methods of MEMS structures, silicon crystals, and wafers, also covering micromachining technologies in MEMS and encapsulation of MEMS components.

Furthermore, it provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques, shows how to protect devices from the environment, and provides tactics to decrease package size for a dramatic reduction in costs.