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Fundamental Principles of Engineering Nanometrology
 
 

Fundamental Principles of Engineering Nanometrology, 1st Edition

 
Fundamental Principles of Engineering Nanometrology, 1st Edition,Richard Leach,ISBN9780080964546
 
 
 

  

William Andrew

9780080964546 New edition

352

Print Book

Hardcover

In Stock

Estimated Delivery Time
USD 175.00
 
 

Richard Leach

Richard Leach is a Principal Research Scientist in the Mass & Dimensional Group, Industry & Innovati

Affiliations and Expertise

National Physical Laboratory, UK

Fundamental Principles of Engineering Nanometrology, 1st Edition

Introduction to metrology for micro- and nanotechnology; Some basics of measurement;  Precision measurement instrumentation - some design principles; Length traceability using interferometry; Displacement measurement; Surface topography measurement instrumentation; Scanning probe and particle beam microscopy; Surface topography characterisation; Co-ordinate metrology; Mass and force measurement; References; Appendix A SI units of measurement and their realisation at NPL; Appendix B SI derived units

 
 
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