Fundamental Principles of Engineering Nanometrology

Fundamental Principles of Engineering Nanometrology, 1st Edition

Fundamental Principles of Engineering Nanometrology, 1st Edition,Richard Leach,ISBN9780080964546


William Andrew

9780080964546 New edition

9781437778328 New edition


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Key Features

  • Provides a basic introduction to measurement and instruments 
  • Thoroughly presents numerous measurement techniques, from static length and displacement to surface topography, mass and force
  • Covers multiple optical surface measuring instruments and related topics (interferometry, triangulation, confocal , variable focus, and scattering instruments)
  • Explains, in depth, the calibration of surface topography measuring instruments (traceability; calibration of profile and areal surface texture measuring instruments; uncertainties)
  • Discusses the material in a way that is comprehensible to even those with only a limited mathematical knowledge


Fundamental Principles of Engineering Nanometrology provides a comprehensive overview of engineering metrology and how it relates to micro and nanotechnology (MNT) research and manufacturing. By combining established knowledge with the latest advances from the field, it presents a comprehensive single volume that can be used for professional reference and academic study.


Academic and industrial researchers in MNT; Industrial MNT quality control personnel; PhD students in MNT; Post and undergraduate students on MNT courses; materials researchers; Design, manufacturing and measurement engineers

Richard Leach

Richard Leach is a Principal Research Scientist in the Mass & Dimensional Group, Industry & Innovati

Affiliations and Expertise

National Physical Laboratory, UK

Fundamental Principles of Engineering Nanometrology, 1st Edition

  1. Introduction to metrology for micro- and nanotechnology
  2. Some basics of measurement
  3. Precision measurement instrumentation - some design principles
  4. Length traceability using interferometry
  5. Displacement measurement
  6. Surface topography measurement instrumentation
  7. Scanning probe and particle beam microscopy
  8. Surface topography characterisation
  9. Co-ordinate metrology
  10. Mass and force measurement


Appendix A: SI units of measurement and their realisation at NPL

Appendix B: SI derived units


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