NOTE: We are upgrading our eBook operations; please allow up to 1-2 days for delivery of your eBook order.
»
Fundamental Principles of Engineering Nanometrology
 
 

Fundamental Principles of Engineering Nanometrology, 1st Edition

 
Fundamental Principles of Engineering Nanometrology, 1st Edition,Richard Leach,ISBN9780080964546
 
 
 

  

William Andrew

9780080964546 New edition

9781437778328 New edition

352

Print Book + eBook

USD 201.00
USD 335.00

Buy both together and save 40%

Print Book

Hardcover

In Stock

Estimated Delivery Time
USD 175.00

eBook
eBook Overview

DRM Free included formats: EPub, Mobi, PDF

USD 160.00
Add to Cart
 
 

Key Features

  • Provides a basic introduction to measurement and instruments 
  • Thoroughly presents numerous measurement techniques, from static length and displacement to surface topography, mass and force
  • Covers multiple optical surface measuring instruments and related topics (interferometry, triangulation, confocal , variable focus, and scattering instruments)
  • Explains, in depth, the calibration of surface topography measuring instruments (traceability; calibration of profile and areal surface texture measuring instruments; uncertainties)
  • Discusses the material in a way that is comprehensible to even those with only a limited mathematical knowledge

Description

Fundamental Principles of Engineering Nanometrology provides a comprehensive overview of engineering metrology and how it relates to micro and nanotechnology (MNT) research and manufacturing. By combining established knowledge with the latest advances from the field, it presents a comprehensive single volume that can be used for professional reference and academic study.

Readership

Academic and industrial researchers in MNT; Industrial MNT quality control personnel; PhD students in MNT; Post and undergraduate students on MNT courses; materials researchers; Design, manufacturing and measurement engineers

Richard Leach

Richard Leach is a Principal Research Scientist in the Mass & Dimensional Group, Industry & Innovati

Affiliations and Expertise

National Physical Laboratory, UK

Fundamental Principles of Engineering Nanometrology, 1st Edition

  1. Introduction to metrology for micro- and nanotechnology
  2. Some basics of measurement
  3. Precision measurement instrumentation - some design principles
  4. Length traceability using interferometry
  5. Displacement measurement
  6. Surface topography measurement instrumentation
  7. Scanning probe and particle beam microscopy
  8. Surface topography characterisation
  9. Co-ordinate metrology
  10. Mass and force measurement

References

Appendix A: SI units of measurement and their realisation at NPL

Appendix B: SI derived units

 
 
Discount on Science and Technology eBooks | Use code DRMFREE
NOTE: We are upgrading our eBook operations; please allow up to 1-2 days for delivery of your eBook order.