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Materials Science in Microelectronics I
 
 

Materials Science in Microelectronics I, 2nd Edition

The Relationships Between Thin Film Processing & Structure

 
Materials Science in Microelectronics I, 2nd Edition,Eugene Machlin,ISBN9780080446400
 
 
 

  

Elsevier Science

9780080446400

9780080459608

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Description

Thin films play a key role in the material science of microelectronics, and the subject matter of thin-films divides naturally into two headings: processing / structure relationship, and structure / properties relationship.

The first volume of Materials Science in Microelectronics focuses on the first relationship – that between processing and the structure of the thin-film. The state of the thin film’s surface during the period that one monolayer exists - before being buried in the next layer – determines the ultimate structure of the thin film, and thus its properties. This volume takes into consideration the following potential influencing factors: crystal defects, void structure, grain structure, interface structure in epitaxial films, the structure of amorphous films, and reaction-induced structure.

An ideal text or reference work for students and researchers in material science, who need to learn the basics of thin films.

Readership

Materials Science postgraduate students and researchers with an interest in thin films.

Eugene Machlin

Affiliations and Expertise

Columbia University , New York, USA

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