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Materials and Processes for Submicron Technologies
 
 

Materials and Processes for Submicron Technologies, 1st Edition

 
Materials and Processes for Submicron Technologies, 1st Edition,J.M. Martinez-Duart,R. Madar,R.A. Levy,ISBN9780080436173
 
 
 

Martinez-Duart   &   Madar   &   Levy   

Elsevier Science

9780080436173

Print Book

Hardcover

In Stock

Estimated Delivery Time
USD 165.00
 
 

Description

The European Materials Society decided to hold a Symposium entitled Materials and Processes for Submicron Technologies in June 16-19, 1998, within the yearly E-MRS Spring Meeting in Strasbourg, France.

The purpose of this meeting was to discuss the results of the advances in microelectronic devices directly relating to the reduction in size of features of the devices down to submicron size. When electronic materials are patterned to these small sizes, their physico-chemical properties show many aspects (interdiffusion, electromigration, etc.), many of these not well known yet. The articles presented in this volume, 28 in number, are representative of the 40 papers accepted for this particular E-MRS Meeting (Symposium N).

J.M. Martinez-Duart

Affiliations and Expertise

Fisica Aplicada, Universidad Cantoblanco, Madrid, Spain

R. Madar

Affiliations and Expertise

LMPG-ENSPG, Saint Martin d'Hères, France

R.A. Levy

Affiliations and Expertise

New Jersey Institute of Technology, Newark, NJ, USA

 
 
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