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Fundamental Principles of Engineering Nanometrology
2nd Edition - May 17, 2014
Author: Richard Leach
Language: English
Hardback ISBN:9781455777532
9 7 8 - 1 - 4 5 5 7 - 7 7 5 3 - 2
eBook ISBN:9781455777501
9 7 8 - 1 - 4 5 5 7 - 7 7 5 0 - 1
Working at the nano-scale demands an understanding of the high-precision measurement techniques that make nanotechnology and advanced manufacturing possible. Richard Leach in…Read more
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Working at the nano-scale demands an understanding of the high-precision measurement techniques that make nanotechnology and advanced manufacturing possible. Richard Leach introduces these techniques to a broad audience of engineers and scientists involved in nanotechnology and manufacturing applications and research. He also provides a routemap and toolkit for metrologists engaging with the rigor of measurement and data analysis at the nano-scale. Starting from the fundamentals of precision measurement, the author progresses into different measurement and characterization techniques.
The focus on nanometrology in engineering contexts makes this book an essential guide for the emerging nanomanufacturing / nanofabrication sector, where measurement and standardization requirements are paramount both in product specification and quality assurance. This book provides engineers and scientists with the methods and understanding needed to design and produce high-performance, long-lived products while ensuring that compliance and public health requirements are met.
Updated to cover new and emerging technologies, and recent developments in standards and regulatory frameworks, this second edition includes many new sections, e.g. new technologies in scanning probe and e-beam microscopy, recent developments in interferometry and advances in co-ordinate metrology.
Demystifies nanometrology for a wide audience of engineers, scientists, and students involved in nanotech and advanced manufacturing applications and research
Introduces metrologists to the specific techniques and equipment involved in measuring at the nano-scale or to nano-scale uncertainty
Fully updated to cover the latest technological developments, standards, and regulations
Engineers and scientists involved in micro- and nanomanufacturing and other nanotechnology areas; students and academics in micro- and nanotechnology
Acknowledgements
List of Figures
List of Tables
Chapter 1. Introduction to Metrology for Advanced Manufacturing and Micro- and Nanotechnology
1.1 What is engineering nanometrology?
1.2 The contents of this book and differences to edition 1
References
Chapter 2. Some Basics of Measurement
2.1 Introduction to measurement
2.2 Units of measurement and the SI
2.3 Length
2.4 Mass
2.5 Force
2.6 Angle
2.7 Traceability
2.8 Accuracy, precision, resolution, error and uncertainty
2.9 The laser
References
Chapter 3. Precision Measurement Instrumentation – Some Design Principles
3.1 Geometrical considerations
3.2 Kinematic design
3.3 Dynamics
3.4 The Abbe principle
3.5 Elastic compression
3.6 Force loops
3.7 Materials
3.8 Symmetry
3.9 Vibration isolation
References
Chapter 4. Length Traceability Using Interferometry
4.1 Traceability in length
4.2 Gauge blocks – both a practical and traceable artefact
4.3 Introduction to interferometry
4.4 Interferometer designs
4.5 Measurement of gauge blocks by interferometry
References
Chapter 5. Displacement Measurement
5.1 Introduction to displacement measurement
5.2 Basic terms
5.3 Displacement interferometry
5.4 Strain sensors
5.5 Capacitive displacement sensors
5.6 Eddy current and inductive displacement sensors