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Semiconductor Industrial Hygiene Handbook

Monitoring, Ventiliation, Equipment and Ergonomics

  • 1st Edition - December 31, 1995
  • Authors: David G. Baldwin, Paul C. Manz, Michael E. Williams
  • Language: English
  • eBook ISBN:
    9 7 8 - 0 - 8 1 5 5 - 1 8 9 7 - 6

This book provides a comprehensive review of the primary industrial hygiene topics relevant to semiconductor processing: chemical and physical agents, and ventilation systems. The… Read more

Semiconductor Industrial Hygiene Handbook

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This book provides a comprehensive review of the primary industrial hygiene topics relevant to semiconductor processing: chemical and physical agents, and ventilation systems. The book also has excellent chapters on newer industrial hygiene concerns that are not specific to the semiconductor industry: ergonomics, indoor air quality, personal protective equipment, plan review, and records retention. While much of the information in these chapters can be applied to all industries, the focus and orientation is specific to issues in the semiconductor industry.