Yu Zhu

Yu Zhu

Yu Zhu received the B.S. degree in radio electronics in 1983 from Beijing Normal University, and the M.S. degree in computer applications in 1993, and the Ph.D. degree in mechanical design and theory in 2001, both from China University of Mining and Technology. He is currently a professor with the Department of Mechanical Engineering, Tsinghua University. His research field mainly covers IC manufacturing equipment development strategy, ultra-precision air/maglev stage machinery design theory and technology, ultra-precision measurement theory and technology, and precision motion control theory and technology. Prof. Zhu has more than 140 research papers and 100 (48 awarded) invention patents.

Affiliations and Expertise

Department of Precision Instruments and Mechanology, Tsinghua University, Beijing, China