Suryadevara Babu

Suryadevara Babu

Suryadevara Babu is distinguished professor and director of CAMP at Clarkson University, USA. His research interests include CMP of Cu, Ta and SiO2, CMP for shallow-trench isolation, particle-free solutions for CMP and post-CMP cleaning.

Affiliations and Expertise

Clarkson University, Potsdam, NY, USA